Simulation on Chemical Mechanical Polishing using Atomic Force Microscope
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C
سال: 2005
ISSN: 0387-5024,1884-8354
DOI: 10.1299/kikaic.71.280